Browsing by Subject "1994 Dissertation G411"

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    • Fabrication of channeling masks for Ion Projection Lithogrphy 
      Ghatak-Roy, Amiya R. (Texas A&M University. Libraries, 1994)
      For sub-0.5 $mu$m feature sizes in VLSI circuits, Ion Projection Lithography shows good promise. One of the key components for this type of lithography is the availability of a suitable mask. Present work involved the ...